IntelLLVM: Enable Fortran module rebuild avoidance in Makefile generators The Makefile generators use an internal `cmake -E cmake_copy_f90_mod` tool to avoid rebuilding module consumers when the `.mod` content changes only in a trivial way (e.g. the time it was built). This is done with logic specific to each vendor's module file format. Enable the "Intel" format support when using the IntelLLVM compiler (ifx) too. Issue: #22922